Monitoring physical and cyber operations in modern industrial systems enhances their dependability by understanding normal behavior and detecting run-time anomalies. In parallel, process mining bridges data science and process science, providing a white-box description of the monitored system behavior through well-defined and interpretable formalisms. This seminar presents an overview of process mining techniques for modeling and analyzing the behavior of cyber-physical systems. It further introduces process mining-based methods for the characterization and detection of deviations. Finally, practical applications in real-world cyber-physical systems are demonstrated, including a water distribution plant and a smart manufacturing assembly line.